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Post-Deposition Patterning of Laser Deposited YBa2Cu3O7−δ Films

Published online by Cambridge University Press:  16 February 2011

R. C. Dye ,
S. Foltyn ,
J. A. Martin ,
N. S. Nogar ,
R. C. Estler ,
R. E. Muenchausen ,
A. Mukherjree ,
S. R. J. Brueck  and
A. H. Carim
R. C. Dye
Affiliation:
Chemical and Laser Sciences DivisionLos Alamos National LaboratoryLos Alamos, New Mexico 87545
S. Foltyn
Affiliation:
Chemical and Laser Sciences DivisionLos Alamos National LaboratoryLos Alamos, New Mexico 87545
J. A. Martin
Affiliation:
Chemical and Laser Sciences DivisionLos Alamos National LaboratoryLos Alamos, New Mexico 87545
N. S. Nogar
Affiliation:
Chemical and Laser Sciences DivisionLos Alamos National LaboratoryLos Alamos, New Mexico 87545
R. C. Estler
Affiliation:
Chemical and Laser Sciences DivisionLos Alamos National LaboratoryLos Alamos, New Mexico 87545
R. E. Muenchausen
Affiliation:
Exploratory Research and Development CenterLos Alamos National LaboratoryLos Alamos, New Mexico 87545
A. Mukherjree
Affiliation:
Center for High Technology MaterialsUniversity of New MexicoAlbuquerque, New Mexico 87131
S. R. J. Brueck
Affiliation:
Center for High Technology MaterialsUniversity of New MexicoAlbuquerque, New Mexico 87131
A. H. Carim
Affiliation:
Center for Micro-Engineered CeramicsUniversity of New MexicoAlbuquerque, New Mexico 87131
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Abstract

We report here on two aspects of non-chemical, post-deposition processing of laser-deposited superconducting Yba2Cu3O7-δthin films. One patterning process consists of placing a contact mask over the film and removes the surrounding material by excimer laser ablation. Good edge definition for 30–100 μm etch features is obtained. However, some redeposition of material is observed. In separate patterning experiments, oxygen-deficient films were re-oxygenated by a direct-write laser heating method. This process produces very smooth edges between the superconducting patterns and the surrounding material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 191: Symposium N – Laser Ablation for Materials Synthesis , 1990 , 193
Copyright
Copyright © Materials Research Society 1990

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References

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