Hostname: page-component-8448b6f56d-qsmjn Total loading time: 0 Render date: 2024-04-23T14:41:08.088Z Has data issue: false hasContentIssue false
  • English
  • Français

Preparation of Microindentations In Cross-Section

Published online by Cambridge University Press:  21 February 2011

Jonathan C. Morris ,
George M. Pharr  and
Daniel L. Callahan
Jonathan C. Morris
Affiliation:
Department of Mechanical Engineering and Materials Science Rice University, P.O. Box 1892, Houston, TX 77251-1892
George M. Pharr
Affiliation:
Department of Mechanical Engineering and Materials Science Rice University, P.O. Box 1892, Houston, TX 77251-1892
Daniel L. Callahan
Affiliation:
Department of Mechanical Engineering and Materials Science Rice University, P.O. Box 1892, Houston, TX 77251-1892
Get access

Abstract

The increased usage of indentation testing for the determination of the toughness of brittle materials has raised many questions about the nature and extent of plastic deformation in these materials. Of particular interest is the behavior of single crystal silicon in indentation (hardness) testing. Recent studies point to some interesting properties of silicon under indentation loading and unloading. The least understood of these properties is the apparent phase change and subsequent cracking that the crystalline silicon experiences upon indentation. The pressure induced phase transformation is thought to proceed by crystalline Si changing to metallic and then changing to amorphous. Accompanying this phase transformation is usually a characteristic cracking pattern.

It is the goal of a larger study to characterize the deformation process during indentation. This can be best achieved by producing an electron transparent cross section of a microindentation which is suitable for structural characterization using a Transmission Electron Microscope (TEM). The various conventional and unconventional methods we have attempted to employ to produce suitable samples, the problems we have encountered, preliminary results, and proposed modifications are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 254: Symposium W – Specimen Preparation for Transmission Electron Microscopy of Materials III , 1991 , 179
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Cook, R. F. and Pharr, G. M., J. Amer. Ceram. Soc. 73. 787 (1990).CrossRefGoogle Scholar
2. Hockey, B. J., J. Amer. Ceram. Soc. 54, 223 (1971).Google Scholar
3. Chan, H. M. and Lawn, B. R., J. Am. Ceram. Soc. 71, 29 (1988).CrossRefGoogle Scholar
4. Khan, M. Y., Brown, L. M., and Chaudhri, M. M., J. Electron Micr Tech 15, 377 (1990).Google Scholar
5. Hockey, B. J. and Lawn, B. R., J. Mat. Sci. 10, 1275 (1975).CrossRefGoogle Scholar
6. Eremenko, V. G. and Nikitenko, V. I., Phys Stat Sol A 14, 317 (1972).CrossRefGoogle Scholar
7. Hill, M. J. and Rowcliffe, D. J., J. Mat. Sci. 9, 1569 (1974).Google Scholar
8. Clarke, D. R., Kroll, M. C., Kirchner, P. D., Cook, R. F., and Hockey, B. J., Phys Rev Lett 60, 2156 (1988).Google Scholar
9. Gerk, A. P. and Tabor, D., Nature 271, 732 (1978).Google Scholar
10. Stone, D., LaFontaine, W. R., Alexopoulos, P., Wu, T-W, and Li, C-Y, J. Mat. Res. 3, 141 (1988).Google Scholar
11. Pharr, G. M., Oliver, W. C., and Clarke, D. R., Sripta Met 21, 1949 (1989).CrossRefGoogle Scholar
12. Gridneva, I. V., Milman, Y. V., and Trefilov, V. I., Phys Stat Sol A 14, 177 (1972).CrossRefGoogle Scholar
13. Shimomura, O., Minomura, S., Sakai, N., Asaumi, K., Tamura, K., Fukushima, J., and Endo, H., Phil. Mag. 29 547–558 (1974).CrossRefGoogle Scholar
14. Pharr, G. M., Oliver, W. C., and Clarke, D. R., J. Elec. Mater. 19, 881 (1990).Google Scholar
15. Benedict, J. P., Anderson, R., and Klepeis, S. J., Electron Microscopy 1990, ed. By Peachey, L. D. and Williams, D. B. (San Francisco Press, San Francisco, 1990) pp. 742–743.Google Scholar