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Principles of Ion Mixing

Published online by Cambridge University Press:  15 February 2011

S. Matteson  and
M.-A. Nicolet
S. Matteson
Affiliation:
Texas Instruments Incorporated, P.O. Box 225936 MS–147, Dallas, TX 75265, USA
M.-A. Nicolet
Affiliation:
California Institute of Technology, Pasadena, CA 91125, USA
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Abstract

Several mechanisms can cause atomic relocation as a result of ion irradiation. Experiments are reviewed that provide information on the atomic redistribution within a solid. Predictions of different models, when compared with these results, shed light on the dominant processes. Sucesses and problem areas are discussed and possible practical applications of the results are explored.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 7 , 1981 , 3
Copyright
Copyright © Materials Research Society 1982

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References

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