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Pulsed Laser Assisted Particulate Cleaning of Solid Surfaces

Published online by Cambridge University Press:  10 February 2011

D. Kumar ,
S. Ivory ,
U. Mahajan  and
Rajiv K. Singh
D. Kumar
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL-32611.
S. Ivory
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL-32611.
U. Mahajan
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL-32611.
Rajiv K. Singh
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL-32611.
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Abstract

In the this paper, we have examined the particulate removal efficiency of laser from solid surfaces. The silicon wafers were contaminated with alumina particles with sizes ranging from 0.05 μm to 0.5 μm. The silicon wafers with uniform surface-distribution of alumina particles were subjected to pulsed laser beams at varying conditions. The results obtained have shown that line beam lasers can remove submicron particles more efficiently from solid surfaces. The mechanism responsible for higher particulate removal-efficiency of line beam laser has also been discussed.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 477 , 1997 , 475
Copyright
Copyright © Materials Research Society 1997

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References

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