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Pyroelectric Coefficient Optimization Through Grain Size Control in (Ba, Sr)TiO3 Thin Films

  • Lawrence F. Schloss (a1) and Eugene E. Haller (a1)

Thin Ba0.2Sr0.8TiO3 films were pulsed laser deposited at laser pulse repetition rates of 1, 5 and 20 Hz in order to assess the effect of grain size on pyroelectric properties. Scanning electron microscopy reveals an increase in columnar grain size with decreasing laser pulse rate, as expected. Substrate bending measurements show an increase in tensile stress with increasing grain size, suggesting some form of stress relaxation has occurred. X-ray diffraction studies reveal all films to be epitaxial and oriented, while Rutherford Backscattering Spectroscopy finds no significant differences in film composition. The films grown at 5 and 20 Hz display a suppressed dielectric permittivity as a function of temperature, while the film deposited at 1 Hz displays an unusually sharp and large dielectric permittivity peak. A variation on current theory concerning phase transitions of stressed ferroelectric thin films is proposed to explain these results.

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