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Raman Scattering from Microcrystalline Films: Considerations of Composite Structures with Different Optical Absorption Properties

Published online by Cambridge University Press:  21 February 2011

R.J. Nemanich ,
E.C. Buehler ,
Y.M. LeGrice ,
R.E. Shroder ,
G.N. Parsons ,
C. Wang ,
G. Lucovsky  and
J.B. Boyce
R.J. Nemanich
Affiliation:
Department of Physics, and Department of Materials Science and Engineering North Carolina State University, Raleigh, NC 27695-8202, USA
E.C. Buehler
Affiliation:
Department of Physics, and Department of Materials Science and Engineering North Carolina State University, Raleigh, NC 27695-8202, USA
Y.M. LeGrice
Affiliation:
Department of Physics, and Department of Materials Science and Engineering North Carolina State University, Raleigh, NC 27695-8202, USA
R.E. Shroder
Affiliation:
Department of Physics, and Department of Materials Science and Engineering North Carolina State University, Raleigh, NC 27695-8202, USA
G.N. Parsons
Affiliation:
Department of Physics, and Department of Materials Science and Engineering North Carolina State University, Raleigh, NC 27695-8202, USA
C. Wang
Affiliation:
Department of Physics, and Department of Materials Science and Engineering North Carolina State University, Raleigh, NC 27695-8202, USA
G. Lucovsky
Affiliation:
Department of Physics, and Department of Materials Science and Engineering North Carolina State University, Raleigh, NC 27695-8202, USA
J.B. Boyce
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304, USA
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Abstract

Raman scattering measurements are used to characterize the components of microcrystalline Si and carbon films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra are dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Carbon films produced by different enhanced CVD techniques show both sp2 (graphite) and sp3 (diamond) regions. Silicon films prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering showed features due to both microcrystalline and amorphous regions. The experimental results reflect the length scales of the domains and vibrational excitations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 164: Symposium H – Materials Issues in Microcrystalline Semiconductors , 1989 , 265
Copyright
Copyright © Materials Research Society 1990

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References

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