Hostname: page-component-8448b6f56d-jr42d Total loading time: 0 Render date: 2024-04-19T02:38:32.441Z Has data issue: false hasContentIssue false
  • English
  • Français

Recent Progress On The Modeling Of Laser Surface Cleaning

Published online by Cambridge University Press:  10 February 2011

Y.F. Lu ,
W. D. Song ,
B.S. Lukyanchuk ,
M.H. Hong  and
W.Y. Zheng
Y.F. Lu
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore, 119260
W. D. Song
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore, 119260
B.S. Lukyanchuk
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore, 119260
M.H. Hong
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore, 119260
W.Y. Zheng
Affiliation:
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore, 119260
Get access

Abstract

Laser cleaning has emerged to effectively remove contaminants from solid surfaces. In this paper, recent progress on laser cleaning has been studied. First, a cleaning model is established for removal of particles from substrate surfaces. The model not only explains the influence of fluence on cleaning efficiency, but also predicts the cleaning thresholds. Following that, the optical resonance and near field effect are discussed for transparent particles with a size of α ∼ λ (radiation wavelength) which strongly influences the intensity distribution in the contacted area (substrate surface). The characterization of ejected particles during laser cleaning is finally investigated. It is found that the particle distribution curves closely fit to Gaussian curve.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 617: Symposium J – Laser-Solid Interactionsfor Materials Processing , 2000 , J1.4
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Zapka, W., Ziemlich, W., and Tam, A.C., Appl. Phys. Lett., 58, 2217 (1991).Google Scholar
2 Imen, K., Lee, S.J. and Allen, S.D., Appl. Phys. Lett., 58(2), 203(1991).Google Scholar
3 Tam, A.C., Leung, W.P., Zapka, W. and Ziemlich, W., J. Appl. Phys. 71(7), 3515(1992).Google Scholar
4 Kelley, J.D. and Hovis, F.E., Microelectronic Engineering 20, 159(1993).Google Scholar
5 Lu, Y.F., Takai, M., Komuro, S., Shiokawa, T. and Aoyagi, Y., Appl. Phys. A 59, 281(1994).Google Scholar
6 Park, H.K., Grigoropoulos, C.P., Leung, W. P. and Tam, A.C., IEEE Transactions on Components, Packaging, and Manufacturing Technology Part A, 17(4) 631(1994).Google Scholar
7 Lu, Y.F., Song, W.D., Hong, M.H., Teo, B.S., Chong, T.C. and Low, T.S., J. Appl. Phys., 80(1), 499(1996).Google Scholar
8 Mann, K., Wolff-Rottke, B. and Muller, F., Appl. Surf. Sci., 98, 463(1996).Google Scholar
9 Oltra, R., Yavas, O., Cruz, F., Boquillon, J.P. and Sartori, C., Appl. Surf. Sci., 98, 484(1996).Google Scholar
10 Wesner, D.A., Mertin, M., Lupp, F. and Kreutz, E.W., Appl. Surf. Sci., 98, 479(1996).Google Scholar
11 Afif, M., Girardeau-Montaut, J.P., Tomas, C., Romamd, M., Charbonnier, M., Prakash, N.S., Perez, A., Marest, G. and Frigerio, J.M., Appl. Surf. Sci., 98, 469(1996).Google Scholar
12 Gobemado-Mitre, I., Medina, J., Calvo, B., Prieto, A.C., Leal, L.A., Perez, B., Marcos, F. and Frutos, A.M. de, Appl. Surf. Sci., 98, 474(1996).Google Scholar
13 Heroux, J.B., Boughaba, S., Ressejac, I., Sacher, E. and Meunier, M., J. Appl. Phys. 79(6), 2857(1996).Google Scholar
14 Song, W.D., Lu, Y.F., Ye, K.D., Tee, C.K., Hong, M.H., Liu, D.M. and Low, T.S., SPIE Vol.3184, 158(1997).Google Scholar
15 Lu, Y.F., Song, W.D., Ang, B.W., Hong, M.H., Chan, D.S.H. and Low, T.S., Appl. Phys. A65, 9(1997).Google Scholar
16 Lu, Y.F., Song, W.D., Ye, K.D., Lee, Y.P., Chan, D.S.H. and Low, T.S., Jpn. J. Appl. Phys., 36(10A), L1304(1997).Google Scholar
17 Lu, Y.F., Song, W.D., Ye, K.D., Hong, M.H., Liu, D.M., Chan, D.S.H. and Low, T.S., Appl. Surf. Sci. 120, 317(1997).Google Scholar
18 Lu, Y.F., Song, W.D., Tee, C.K., Chan, D.S.H. and Low, T.S., Jpn. J. Appl. Phys. Part 1, No.3A, 840(1998).Google Scholar
19 Lu, Y.F., Zheng, Y.W., Song, W.D., Appl. Phys. A 68, 569(1999).Google Scholar
20 Lu, Y.F., Zheng, Y.W., Song, W.D., J. Appl. Phys. 87(3), 1534(2000).Google Scholar
21 Lu, Y.F., Zheng, Y.W., Song, W.D., J. Appl. Phys. 87(1), 549(2000).Google Scholar
22 Derjaguin, B.V., Muller, V.M. and Toporov, YU.P., Journal of Colloid and Interface Science, 53(2), 314(1975).Google Scholar
23 Muller, V.M, Yushchenko, V.S. and Derjaguin, B.V., Journal of Colloid and Interface Science, 77(1), 91(1980).Google Scholar
24 Muller, V.M., Yushchenko, V.S. and Derjaguin, B.V., Journal of Colloid and Interface Science, 92(1), 92(1983).Google Scholar
25 Press, W.H., Teulolsky, S.A., Wetterling, W.T. and Flannery, B.P., Numerical Recipes in C, The Art of Scientific Computing, Second Edition, Cambridge University Press, 1992.Google Scholar
26 Stratton, J. A.: Electromagnetic Theory, (McGraw-Hill, New York & London, 1941).Google Scholar
27 Hulst, H. C. Van de: Light Scattering by Small Particles, (Dower Publ., New York, 1981).Google Scholar
28 Bohren, C. E., Huffman, D. R.: Absorption and Scattering of Light by Small Particles, (John Willey & Sons, 1983).Google Scholar
29 Born, M., Wolf, E.: Principles of Optics, 7-th Edition, (Cambridge University Press, 1999).Google Scholar
30 Kerker, M.: The scattering of Light, (Academic Press, New York & London, 1969).Google Scholar
31 Bobbert, P. A., Vlieger, J., Physica A, vol. 137, pp. 209–242 (1986).Google Scholar
32 Prokhorov, A. M., Konov, V. I., Ursu, I., Mihailescu, I.: “Interaction of Laser Radiation with Metals” (Moscow, Nauka, 1988).Google Scholar