Hostname: page-component-8448b6f56d-xtgtn Total loading time: 0 Render date: 2024-04-24T06:32:29.311Z Has data issue: false hasContentIssue false

Reliable, Fast and Long Retention Si Nanocrystal Non-Volatile Memories

Published online by Cambridge University Press:  01 February 2011

Josep Carreras
Affiliation:
EME, Electronics Department, University of Barcelona, C. Martí i Franqués 1, 08028, Barcelona, Spain
B. Garrido
Affiliation:
EME, Electronics Department, University of Barcelona, C. Martí i Franqués 1, 08028, Barcelona, Spain
J. Arbiol
Affiliation:
EME, Electronics Department, University of Barcelona, C. Martí i Franqués 1, 08028, Barcelona, Spain
J. R. Morante
Affiliation:
EME, Electronics Department, University of Barcelona, C. Martí i Franqués 1, 08028, Barcelona, Spain
Get access

Abstract

We report in this work a Si-nanocrystal (Si-nc) MOS basic cell which shows, at the same time, fast writing times and long charge retention. This has been achieved by optimizing a structure reported previously that exhibited excellent retention characteristics. For the new structure, 15 keV Si ions have been implanted in a 40 nm thick oxide at high doses in order to obtain Si excess ranging from 10 to 20 atomic % at projected range (25nm). An annealing step at 1100 °C has been performed to precipitate the nanocrystals. We show that there is a Si excess compromise (density depth profile of Si-nc) in which write times are improved by at least 3 orders of magnitude (to the submillisecond range) while still maintaining a virtually infinite retention time. Such behavior has been correlated with structural characterization by EFTEM, which reveals a control oxide completely free of Si clusters and thick enough (11 nm) to prevent tunnelling from/to the gate electrode. The Si-ncs are located around the projected range and show a mean size of 2.7 ± 0.2 nm. The tunnel oxide is not completely free of Si-nc or clusters, as observed by EFTEM, but there is a significant reduction in mean size and density when approaching to the p-type substrate. We believe that these small Si-nc or clusters in the tunnel oxide play an important role in improving the performance of the devices. For charging (writing), when a gate bias is applied to the structure, these clusters assist like traps when tunneling to the central region. However, when the Si-nc are already charged, these nanoclusters do not similarly enhance the discharge process because they have larger band-gaps (due to quantum confinement) than the bigger Si-nc in the center of the layer, and therefore act as an insulating material. This simple model, based on the correlation of the most important electrical memory parameters and the structural information, has allowed us to engineer the implantation dose as a technological parameter when a trade-off between write and retention times is required. For our samples, this dose is about of 15% Si excess. Finally, endurance tests have been performed, showing a completely flat and stable programming window after 106 Write/Erase programming pulses.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tiwari, S., Rana, F., Hanafi, H., Hartstein, A., Crabbe, E. F. and Chan, K., Appl. Phys. Lett. 68, 1377 (1996).Google Scholar
2. Molas, G., De Salvo, B., Mariolle, D., Ghibaudo, G., Toffoli, A., Buffet, N. and Deleonibus, S. Solid-State Electronics, Volume 47, Issue 10, October 2003, Pages 16451649.Google Scholar
3. Kapetanakis, E., Normand, P., Tsoukalas, D., and Beltsios, K., Appl. Phys. Lett. 80, 2794 (2002).Google Scholar
4. Ziegler, J. F., Biersack, J. P. and Littmark, U., The stopping and range of ions in solids vol. 1, Pergamon Press, New York (USA), 1985.Google Scholar
5. Müller, T., Heinig, K.H., and Möller, W., Appl. Phys. Lett. 81, 3049 (2002).Google Scholar
6. Bonafos, C., Carrada, M., Cherkashin, N., Coffin, H., Chassaing, D., Ben Assayag, G., Claverie, A., Müller, T., Heinig, K. H., Perego, M., Fanciulli, M., Dimitrakis, P. and Normand, P., J. Appl. Phys. 95, 5696 (2004)Google Scholar
7. Garrido, B., Lopez, M., Garcia, C., Perez-Rodriguez, A., Morante, J. R., Bonafos, C., Carrada, M., and Claverie, A., J. Appl. Phys. 91, 798 (2002)Google Scholar
8. Lopez, M., Garrido, B., Garcia, C., Perez-Rodriguez, A., Morante, J. R., Bonafos, C., Carrada, M., and Claverie, A., Appl. Phys. Lett. 80, 1637 (2002).Google Scholar
9. DiMaria, D. J., J. Appl. Phys. 86, 2100 (1999)Google Scholar
10. Ohba, R., Sugiyama, N., Uchida, K., Kora, J. and Toriumi, A., IEEE Trans. Electron Dev. 49, 1392 (2002); IEEE IEDM Tech. Dig. (2000)Google Scholar
11. Lee, C., Gorur-Seetharam, A. and Kan, E., IEEE IEDM Tech. Dig. (2003)Google Scholar