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Residual Stress Distribution, Intermolecular Force, AndFrictional Coefficient Maps In Diamond Films:Processing-Structure-Mechanical Property Relationship

Published online by Cambridge University Press:  26 February 2011

Sanju Gupta ,
Oliver Williams ,
R. J. Patel ,
E. Bohannan  and
P. W. May
Sanju Gupta
Affiliation:
sgup@rocketmail.com, University of Missouri-Columbia, Electrical and Computer Engineering, 6th St. 303 EBW, Columbia, MO, 65211-2300, United States, 57388200948, 5738820397
Oliver Williams
Affiliation:
sgup@rocketmail.com, Institute of Materials Research, Diepenbeek, BE-3590, Belgium
R. J. Patel
Affiliation:
sgup@rocketmail.com, Missouri State University, Physics and Materials Science Department, 901 S. National Ave., Springfield, MO, 65987, United States
E. Bohannan
Affiliation:
sgup@rocketmail.com, University of Missouri-Rolla, Department of Chemistry, Rolla, MO, 65409, United States
P. W. May
Affiliation:
sgup@rocketmail.com, University of Bristol, School of Chemistry, Bristol, BS8 1TS, United Kingdom
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Abstract

Carbon in its various forms, specifically nanocrystalline diamond, maybecome a key material for the manufacturing of micro- andnano-electromechanical (M/NEMS) devices in the 21st Century. In order toutilize effectively these materials for M/NEMS applications, understandingof their microscopic structure and physical (mechanical properties, inparticular) become indispensable. The micro- and nanocrystalline diamondfilms were grown using hot-filament and microwave chemical vapor depositiontechniques involving novel CH4 / [TMB for boron doping and H2S for sulfurincorporation] in high hydrogen dilution chemistry. To investigate residualstress distribution and intermolecular forces at nanoscale, the films werecharacterized using Raman spectroscopy and atomic force microscopy in termsof topography, force curves and force volume imaging. Traditional forcecurve measures the force felt by the tip as it approaches and retracts froma point on the sample surface, while force volume is an array of forcecurves over an extended range of sample area. Moreover, detailed microscalestructural studies are able to demonstrate that the carbon bondingconfiguration (sp2 versus sp3 hybridization) and surface chemicaltermination in both the un-doped and doped diamond have a strong effect onnanoscale intermolecular forces. The preliminary information in the forcevolume measurement was decoupled from topographic data to offer new insightsinto the materials's

Keywords

diamondchemical vapor deposition (CVD) (deposition)microelectro-mechanical (MEMS)

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