AlGaAs/GaAs single-quantum-well (SQW) vertical-cavity surface-emitting laser diodes (VCSELDs) with 20 pairs of AlAs (71 nm)/GaAs (59 nm) distributed Bragg reflectors (DBRs) were grown on Si substrates by metalorganic chemical vapor deposition using the conventional two-step growth technique. The measured reflectivity of the 20 pairs of AlAs/GaAs DBRs was 93 % at the wavelength of 860 nm. The AlGaAs/GaAs SQW VCSELD on Si exhibited a threshold current of 79 mA and a threshold current density of 4.9 kA/cm2 under pulsed condition at room temperature. The emission wavelength was 840.3 nm with the full width at half maximum of 0.28 nm.
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