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A simulation study for defects in sub-15 nm line-space using directed self-assembly

Published online by Cambridge University Press:  21 April 2015

Hideki Kanai ,
Katsuyoshi Kodera ,
Yuriko Seino ,
Hironobu Sato ,
Yusuke Kasahara ,
Katsutoshi Kobayashi ,
Ken Miyagi ,
Shinya Minegishi ,
Naoko Kihara  and
Yoshiaki Kawamonzen
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Hideki Kanai
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Katsuyoshi Kodera
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Yuriko Seino
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Hironobu Sato
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Yusuke Kasahara
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Katsutoshi Kobayashi
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Ken Miyagi
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Shinya Minegishi
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Naoko Kihara
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Yoshiaki Kawamonzen
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Tomoharu Fujiwara
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Noriyuki Hirayanagi
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Toshikatsu Tobana
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
Tsukasa Azuma
Affiliation:
EUVL Infrastructure Development Center, Inc. (EIDEC), 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan
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Abstract

A specific type of buried defect in lamellar phase diblock copolymer was studied by experiments and simulations using self-consistent field theory (SCFT). The defects had 3-dimensional structures and created hexagonally arranged holes. They existed not only on the substrate with the guide structures but in fingerprints. The simulation results suggested that one of the causes of the defects is mismatch of the surface affinity of the neutral layer.

Keywords

morphologypolymersimulation

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Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1750: Symposium KK – Directed Self-Assembly for Nanopatterning , 2015 , mrsf14-1750-kk05-18
Copyright
Copyright © Materials Research Society 2015 

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References

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