Skip to main content

Stability and Nanostrucure of Heterogeneous Amorphous Silicon Thin-Film Synthesized Under High Chamber Pressure (500 To 2200 Mtorr) Regime of Rf Pecvda

  • A. R. Middya (a1) (a2), S. Hamma (a1), S. Hazra (a2), S. Ray (a2) and C. Longeaud (a3)...

We report on improvement in stability of a new type of amorphous silicon films, synthesized (growth rate > 0.1 nm/s) by driving the plasma condition close to the powder regime (or “γ-regime”) of rf PECVD. These films exhibit high mobility-lifetime products [(μτ)annld ∼ 10−4 cm2/V, σphd ∼ 5-10×105, Ea ≍ 0.7 - 0.9 eV ], compact network structure [CH ≍ 7 to 8 at%, nanovoid density < 0.01 %, ρ ≍ 2.23 ± 0.01 gm/cm3], new features of optical properties and density-of-state (DOS) above EF is significantly lower than that of state-of-the art films. The kinetics of light-induced (AM 1.5) degradation of μτ is very fast and saturated μτ ∼ 10−6 cm2/V, a value similar to that of conventional a-Si:H films at annealed state. The improved stability of “new” a-Si films, henceforth it will be denoted as “quasi-amorphous silicon (qm-Si) thin- film”, will be correlated with its specific nanostructure.

Hide All
1.Tsu, D. V., Chao, B. S., Ovshinsky, S. R., Guha, S. and Yang, J., Appl. Phys. Lett. 71 (1997) 1317.
2.Koh, J., Lee, Y., Fujiwara, H., Wronski, C. R. and Collins, R. W., Appl. Phys. Lett. 73 (1998) 1526.
3.Zhao, Y., Kong, G., Pan, G., Liao, X., Phys. Rev. Lett. 74 (1995) 558.
4.Ray, S., Hazra, S., Middya, A. R. and Barua, A. K., Conf. Record. 1st World PVSC conference, (Hawaii, 1994) 551.
5.Middya, A. R., Hazra, S., Ray, S., Longeaud, C. and Kleider, J. P., Mat. Res. Soc. Symp. Proc. 467 (1997) 615.
6.Hazra, S., Middya, A. R., Longeaud, C. and Ray, S., Appl. Phys. Letts. 76 (2000) 2340.
8.Perrin, J., Plasma Deposition of Amorphous-based Materials edited by Bruno, G., Capezzuto, P. and Madan, A. (Academic Press, 1995) p. 216; J. Perrin, J. Non-Cryst. Solids 137 & 138 (1991) 639.
9.Cabarrocas, P. Roca i, Hamma, S., Sharma, S. N., Viera, G., Bertran, E. and Costa, J., J. Non-Cryst. Solids 227–230 (1998) 871.
10.French, I. D., Deane, S. C., Murley, D. T., Hewett, J., Gale, I. G. and Powell, M. J., Mat. Res. Soc. Symp. Proc. 467 (1997) 875.
11.Ferlaut, A. S. Koh, o. J., Rovira, P. I., Wronski, C. R. and Collins, R. W., Mat. Res. Soc. Symp. Proc. 557 (1999) 579.
12.Williamson, D. L., Mat. Res. Soc. Symp. Proc. 377 (1995) 251, D. L. Williamson, Mat. Res. Soc. Symp. Proc. 557 (1999) 251.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 5 *
Loading metrics...

Abstract views

Total abstract views: 72 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 23rd April 2018. This data will be updated every 24 hours.