Hostname: page-component-54dcc4c588-sdd8f Total loading time: 0 Render date: 2025-10-04T01:19:23.736Z Has data issue: false hasContentIssue false
  • English
  • Français

Stress Measurement in Spin Coated Polyimide Films Using Time Average Holographic Interferometry

Published online by Cambridge University Press:  21 February 2011

Michele A. Maden  and
Richard J. Farris
Michele A. Maden
Affiliation:
Polymer Science and Engineering Department, University of Massachusetts, Amherst, MA 01003
Richard J. Farris
Affiliation:
Polymer Science and Engineering Department, University of Massachusetts, Amherst, MA 01003
Get access

Abstract

It is proposed that the stresses in a thin polyimide film can be analyzed using the solution to the problem of a vibrating membrane. The polyimide membrane is supported on a copper substrate and excited with a small speaker. The membrane vibrates uniformly in response to its resonant frequencies. The vibration pattern will be recorded using holographic interferometry. The biaxial stress in the film is calculated from the measured characteristic frequency, the density of the material, and the mode of vibration. This technique may also be used to determine the Poisson's ratio of the film by combining uniaxial and biaxial stress analyses.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 143
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1. Gabor, Dennis, Nature, 161, 777, (1948).Google Scholar
2. Leith, E.N. and Upatnieks, J., Scientific American, 212(6),24, (1965).Google Scholar
3. Powell, R.L. and Stetson, K. A., J. Opt. Soc. Am., 55(12), 1593, (1965)Google Scholar
4. Heflinger, L.O., Wuerker, R. F., Brooks, R. E., J. App.Phys., 37(2), 642, (1966).Google Scholar
5. Keith Pennington, S., Scientific American, 219(2), 40, (1968).Google Scholar
6. Charles Taylor, E., Experimental Mechanics, 19(9), 339, (1979).Google Scholar
7. Gray, A. and Mathews, G. B., Bessel Functions and their Applications to Physics, p.302, (1952).Google Scholar
8. Watson, G.N., A Treatise on the Theory of Bessel Functions, pp. 748–750, (1962).Google Scholar
9. Sampson, R.C., Applications of Holographic Interferometry Techniaues to Structures Problems. Pub. No. WO 8721–04, (1968).Google Scholar
10. Leissa, Arthur W., Vibration of Thin Plates (NASA Publication), (1969).Google Scholar
11. Charles Bauer, L., PhD thesis, University of Massachusetts, 1988.Google Scholar