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Stress-Corrosion Cracking of Spin-on Glass Thin Films

Published online by Cambridge University Press:  10 February 2011

Robert F Cook  and
Eric G Liniger
Robert F Cook
Affiliation:
IBM Research, Yorktown Heights, NY 10598
Eric G Liniger
Affiliation:
IBM Research, Yorktown Heights, NY 10598
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Abstract

The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. An absolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 511: Symposium E – Low Dielectric Constant Materials IV , 1998 , 171
Copyright
Copyright © Materials Research Society 1998

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