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Structure of Hydrogen in Microcrystalline and Amorphous Silicon: an NMR Comparison

Published online by Cambridge University Press:  26 February 2011

S. E. Ready ,
J. B. Boyce  and
C. C. Tsai
S. E. Ready
Affiliation:
XEROX Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304.
J. B. Boyce
Affiliation:
XEROX Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304.
C. C. Tsai
Affiliation:
XEROX Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304.
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Abstract

Hydrogen NMR data on three microcrystalline silicon samples grown by plasma decomposition using different H2/SiH4 gas ratios are examined. A decrease of the total atomic percent hydrogen content from 12 at.% to 6 at.% is seen as the gas ratio is reduced from 98/1 to 20/1. 20 to 40% of this total hydrogen content is determined to be non-bonded molecular hydrogen. In addition, evidence for SiH2 units is seen in the spectrum.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 118: Symposium E – Amorphous Silicon Technology , 1988 , 103
Copyright
Copyright © Materials Research Society 1988

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References

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