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The Structure of the (001)Si/SiO2 Interface

Published online by Cambridge University Press:  22 February 2011

A. Ourmazd  and
J. Bevk
A. Ourmazd
Affiliation:
AT&T Bell Laboratories, Holmdel, NJ 07733.
J. Bevk
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974.
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Abstract

We show that a careful examination of previous microscopic structural data from the Si/SiO 2 interface reveals that the presence of an epitaxial interfacial oxide cannot be ruled out, and describe the conditions necessary for a definitive search for an intervening layer between c-Si and a-SiO 2 We present electron diffraction and lattice imaging data, which establish the c-Si→a-SiO 2 transition to take place via a crystalline layer ˜7 A thick. Modelling of lattice images in two projections indicates the crystalline oxide to be tridymite, a stable, bulk phase of SiO 2

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 105: Symposium F – SiO2 and Its Interfaces , 1987 , 1
Copyright
Copyright © Materials Research Society 1988

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