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Study of Non-Aqueous Passivation on GaSb (100) Surfaces

Published online by Cambridge University Press:  01 February 2011

Z.Y. Liu
Affiliation:
Department of Chemical Engineering, University of Wisconsin-Madison, Madison, Wisconsin, 53706
T.F. Kuech
Affiliation:
Department of Chemical Engineering, University of Wisconsin-Madison, Madison, Wisconsin, 53706
D.A. Saulys
Affiliation:
Materials Research Science and Engineering Center, University of Wisconsin-Madison, Madison, Wisconsin, 53706
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Abstract

Due to the high chemical reactivity of GaSb surfaces, many commonly used aqueous sulfide passivation techniques lead to the growth of surface oxides that degrade device performance. We have developed a non-aqueous passivation regime consisting of Na2S/benzene/15-crown-5/oxidant. The use of a non-polar, aprotic organic medium required the addition of a specific chelating agent, i.e. a 15-crown-5 ether, to solubilize sodium sulfide, and organic oxidizing agents, such as anthraquinone and benzophenone, to act as electron acceptors. The surface optical and chemical properties of GaSb surfaces after aqueous and non-aqueous sulfide treatments were compared. Non-aqueous passivation resulted in higher PL intensity, lower oxide content, and a less amount of elemental Sb than aqueous passivation.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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References

1 Liu, Z.Y., Hawkins, B., and Kuech, T.F., J. Vac. Sci. Technol. B 21, 71 (2003)Google Scholar
2 Schwartz, G.P., Gualtieri, G.J., Griffiths, J.E., Thurmond, C.D. and Schwartz, B., J. Electrochem. Soc. 127, 2488 (1980)Google Scholar
3 Lu, Z., Jiang, Y., Wang, W.I., Teich, M.C., and Osgood, R.M. Jr , J. Vac. Sci. Technol. B 10, 1856 (1992)Google Scholar
4 Dutta, P.S., Rao, K.S.R. Koteswara, Bhat, H.L., and Kumar, V., J. Appl. Phys. 77, 4825 (1995)Google Scholar
5 Perotin, M., Coudray, P., Gouskov, L., Luquet, H., Llinares, C., Bonnet, J.J., Soonckindt, L., and Lambert, B., J. Electron Mater. 23, 7 (1994)Google Scholar
6 Diaz-Reyes, J., Corona-Organiche, E., Herrera-Perez, J.L., and Mendoza-Alvarez, J.G., Modern Phys. Lett. B 15, 804 (2001)Google Scholar
7 Polyakov, A.Y., Milnes, A.G., Li, X.L., Balmashnov, A.A., and Smirkov, N.B., Solid State Electronics 38, 1743 (1995)Google Scholar
8 CRC Handbook of Chemistry and Physics (CRC Press, Cleveland, Ohio, 1987)Google Scholar
9 Meites, L. and Zuman, P., CRC Handbook Series in Organic Electrochemistry, Vol. I (CRC Press, Cleveland, Ohio, 1977-1987)Google Scholar
10 Briggs, D. and Seah, M.P., Practical Surface Analysis, Vol. 1: Auger and X-ray Photoelectron Spectroscopy (Wiley, Chichester, New York, 1990)Google Scholar
11 Bessolov, V. N., Ivankov, A.F., and Lebedev, M.V., J. Vac. Sci. Technol. B 13, 1018 (1995)Google Scholar
12 Bessolov, V. N., Konenkova, E.V., and Lebedev, M.V., Mat. Sci. Eng. B 44, 376 (1997)Google Scholar
13 Bessolov, V. N. and Lebedev, M.V., Semiconductors 32, 1141 (1998)Google Scholar
14 Bessolov, V. N., Konenkova, E.V., and Lebedev, M.V., J. Vac. Sci. Technol. B 14, 2761 (1996)Google Scholar
15 Pacey, G.E.. Lithium Crown Ether Complexes. In Lithium. Current Applications in Science, Medicine, and Technology (Wiley: New York, 1985)Google Scholar
16 Parker, J., Chem. Reviews 69, 1 (1969)Google Scholar
17 Muller, U., Inorganic Structural Chemistry (Wiley, Chichester, New York, 1993)Google Scholar
18 Willey, R. and Ravindran, M., Inorg. Chim. Acta 183, 167 (1991)Google Scholar
19 Hough, E., Nicholson, D.G., and Vasudevan, A.K., J. Chem. Soc. Dalton Trans. 427 (1987)Google Scholar