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    Gokce, O. H. Sears, J. T. and Sahin, T. 1996. Film morphology and reaction rate for the CVD of tungsten by the WF6—SiH4 reaction. Journal of Electronic Materials, Vol. 25, Issue. 9, p. 1531.


Surface Diffusion: Atomistics and Surface Morphology (Summary of MRS Symposium B Panel Discussion)

  • M. H. Grabow (a1), P. J. Feibelman (a2), G. H. Gilmer (a1), B. H. Cooper (a3) and Y. W. Mo (a4)
  • DOI:
  • Published online: 01 February 2011

This paper gives some of the highlights of a panel discussion on surface diffusion held Monday, November 30, 1992 at the Fall MRS Meeting in Boston, Massachusetts. Four invited speakers discussed computer modeling techniques and scanning tunneling microscopy experiments that have been used to provide new understanding of the atomistic processes that occur at surfaces. We present a summary of each of the invited talks, indicate other presentations on surface diffusion in this proceedings, and provide a transcript of the two discussion sessions.

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1.The Theory of the Inhomogeneous Electron Gas, eds. S. Lundqvist and N. H. March (Plenum Press, New York, 1983).

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Y.W. Mo J. Kleiner , M.B. Webb , and M.G. Lagally , Phys. Rev. Lett. 66, 1998 (1991).

5.C. Roland and G. H. Gilmer , Phys. Rev. Lett. 67, 3188 (1991).

10.Y.W. Mo , Phys. Rev. Lett. 69, 3643 (1992).

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G. Raynerd , T. N. Doust , and J. A. Venables , Surf. Sci. 261, 251 (1992).

15.G. L. Kellogg and A. F. Voter , Phys. Rev. Lett. 67, 622 (1991).

16.H. D. Velfe , H. Stenzel , and M. Krohn , Thin Solid Films 98, 115 (1982); see also reviews, e.g. by Robins, Venables, Bethge, etc. in various places.

17.T. Michely and G. Comsa , Surface Science 256, 217 (1991).

19.R. Casanova and T. T. Tsong , Thin Solid Films, 93, 41 (1982).

E. Ganz , S. K. Theiss , I.-S. Hwang , J. Golovchenko , Phys. Rev. Lett. 68, 1567 (1992).

See also R. Gomer , Repts. Prog. Phys. 53, 917 (1990);

22.A. G. Naumovets and Y. S. Vedula , Surf. Sci. Reports 4, 365 (1985);

I. Lyuksyutov , A. G. Naumovets and V. Pokrovsky , Two-dimensional crystals, Academic Press (1992).

23.T. T. Tsong , Repts. Prog. Phys. 51, 759 (1988).

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MRS Online Proceedings Library (OPL)
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  • EISSN: 1946-4274
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