Skip to main content

Surface States at LT GaAs-n+ GaAs Interfaces

  • Ashlsh K. Verma (a1), J. S. Smith (a1) and Eicke R. Weber (a2)

GaAs grown using Molecular Beam Epitaxy at below normal substrate temperatures (∼ 220 °C) has found many potential applications in GaAs MESFET devices. These so-called Low Temperature (LT) layers were originally used between the MESFET substrate and active region to eliminate backgating effects.[1] More recently, LT layers have been incorporated into MESFET gate structures to improve gate breakdown characteristics.[2] [3] When used in this capacity, the quality of the LT GaAs - n+ GaAs interface becomes an important issue: a large number of traps at the interface will result in channel mobility degradation. Furthermore, it is desirable to develop a method by which the interface quality can be evaluated through simple electrical measurements.

Hide All
1. Smith, F. W., Calawa, A. R., Chen, C.-L., Manfra, M.J. and Mahoney, L.J., IEEE Electron Device Lett. 9, 77 (1988).
2. Yin, L.-W., Hwang, Y., Lee, J.H., Kolbas, R.M., Trew, R.J. and Mishra, U.K., IEEE Electron Device Lett. 11, 561 (1990).
3. Chen, C.-L., Smith, F.W., Clifton, B.J., Mahoney, L.J., Manfra, M.J. and Calawa, A.R., IEEE Electron Device Lett. 12, 306 (1991).
4. Nicollian, E.H. and Goetzenberger, A., Bell System Tech. J. 46, 1055 (1967).
5. Sze, S.M., Physics of Semiconductor Devices. 2nd ed. (J. Wiley, New York, 1981).
6. Manasreh, M.O., Look, D.C., Evans, K.R. and Stutz, C.E., Phys. Rev. B 41, 10272 (1990).
7. Shinoda, Y. and Kobayashi, T., J. Applied Physics 52, 6386 (1981).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed