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Synthesis and electrical characterization of ZnO and TiO2 thin films and their use as sensitive layer of pH field effect transistor sensors

Published online by Cambridge University Press:  22 August 2014

Jessica C. Fernandes  and
Marcelo Mulato
Jessica C. Fernandes
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto/São Paulo – Brazil
Marcelo Mulato
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto/São Paulo – Brazil
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Abstract

Oxide thin films of zinc and titanium materials were deposited by different deposition techniques, to be applied as sensitive layers of pH sensor – EGFET device. The deposition techniques tested were dip-coat, spin-coat, electrodeposition and spray-pyrolysis. The routine and the parameters of each technique were changed aiming optimized the procedures. The pHs buffer solutions tested ranged from 2 to 12. ZnO thin film shows sensitivity about 23 mV/pH, while TiO2 thin films shows only 13.8 mV/pH. The final purpose of this study is to optimize the parameters for each deposition technique for both oxide materials.

Keywords

coatingelectrical propertiessensor

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References

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