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Synthesis of Silicon Nano-particles for Thin Film Electrodes Preparation

Published online by Cambridge University Press:  01 February 2011

David Munao ,
Jan van Erven ,
Mario Valvo ,
Vincent Vons ,
Alper Evirgen  and
Erik Kelder
David Munao
Affiliation:
d.munao@tudelft.nl, TUDelft, ChemE, Delft, Netherlands
Jan van Erven
Affiliation:
j.w.m.vanerven@tudelft.nl, TUDelft, ChemE, Delft, Zuid Holland, Netherlands
Mario Valvo
Affiliation:
M.Valvo@tudelft.nl, TUDelft, ChemE, Delft, Zuid Holland, Netherlands
Vincent Vons
Affiliation:
V.A.Vons@tudelft.nl, TUDelft, ChemE, Delft, Zuid Holland, Netherlands
Alper Evirgen
Affiliation:
A.Evirgen-1@student.tudelft.nl, TUDelft, ChemE, Delft, Zuid Holland, Netherlands
Erik Kelder
Affiliation:
E.M.Kelder@tudelft.nl, TUDelft, ChemE, Delft, Zuid Holland, Netherlands
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Abstract

The present work concerns novel approaches to fabricate silicon-based electrodes. In this study silicon nano-particles are synthesized via two aerosol routes: Laser assisted Chemical Vapour Pyrolysis (LaCVP) and Spark Discharge Generation (SDG). These two techniques allow the generation of uniformly sized particles, with a good control over the composition and the range of sizes. Herein, particles with size ranging from 2 to 70 nm were obtained. Starting from these nano-particles, nano-structured porous thin films are produced either by electrospraying a polymeric solution in which LaCVP-produced particles were previously dispersed, or by inertial impacting the SDG-produced particles directly from gas phase onto a substrate. The Electro- Spray (ES) is used to produce composite films for Li-ion battery applications, whereas the Inertial Impaction (II) is used to produce pure silicon films for other purposes (i.e.: sensors).

Keywords

Sifilmenergy storage
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1245: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology-2010 , 2010 , 1245-A09-06
Copyright
Copyright © Materials Research Society 2010

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