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Tetragonal Distortion in VPE and LPE In1-xGaxAs Grown on (100) Inp

Published online by Cambridge University Press:  22 February 2011

A. T. Macrander  and
S. N. G. Chu
A. T. Macrander
Affiliation:
Bell Laboratories, Murray Hill, NJ 07974
S. N. G. Chu
Affiliation:
Bell Laboratories, Murray Hill, NJ 07974
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Abstract

The tetragonal distortion present in both VPE and LPE In1-xGaxAs was measured from X-ray rocking curves of the (511) reflection. These measurements were then used to establish coherency limits. In addition, wafer curvature was measured and compared to that calculated via an expression which incorporates both tetragonal distortion and misfit dislocations. Agreement was found except for a case in which stacking faults were present.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 25: Symposium C – Thin Films and Interfaces II , 1983 , 491
Copyright
Copyright © Materials Research Society 1984

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References

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