Skip to main content Accessibility help
×
Home

Thermal and Photoinduced Decomposition Pathways of Arsine on GaAs(100)

  • X.-Y. Zhu (a1), M. Wolf (a1), T. Huett (a1) and J. M. White (a1)

Abstract

We have studied the thermal and photoinduced dissociation pathway of AsH3 on the Ga-rich GaAs(100) surface. Arsine adsorbs molecularly at 115 K and dissociates upon either heating to above 140 K or upon irradiation with 3.5 - 6.4 eV photons. The decomposition of arsine is accompanied by the formation of surface Ga-H species, which are thermally and photochemically more stable than surface AsHx. A comparison of the wavelength dependence for adsorbed and gas phase arsine reveals that the excitation mechanism of the AsH3 surface photochemistry is substrate mediated, which probably involves a charge transfer between surface states and the adsorbate.

Copyright

References

Hide All
1. Smith, F. T. J., Prog. Solid. State Chem. 19, 111 (1989).
2. Usuri, A. and Watanabe, H., Ann. Rev. Mater. Sci. 21, 185 (1991).
3 Balk, P., Fischer, M., Grundmann, D., Lückerath, R., Lüth, H., and Richter, W., J. Vac. Sci. Technol. B, 59 1453 (1987).
4. Tamaru, K., J. Chem. Phys 59 777 (1957).
5. Larson, C. A., Buchanan, N. I., and Stringfellow, G. B., Appl. Phys. Lett. 52, 480 (1988).
6. Wolf, M., Zhu, X.-Y., Huett, T., and White, J. M., Surf. Sci. (submitted).
7. Zhu, X.-Y., Wolf, M., and White, J. M., J. Chem. Phys. (submitted).
8. Zhu, X.-Y., and White, J. M., J. Chem. Phys. 94, 1555 (1991).
9. Drathen, P., Ranke, W., and Jacobi, K., Surf. Sci. 77, L162 (1978).
10. Bachrach, R. Z., Bauer, R. S., Chiaradia, P. and Hansson, G.V., J. Vac. Sci. Technol. 18, 797 (1981).
11. Creighton, J. R., Surf. Sci. 234, 287 (1990).
12. Lukerath, R., Tommak, P., Hertling, A., Koss, H. J., Balk, P., Jensen, K. F., and Richter, W., J. Cryst. Growth 93, 151 (1988).
13. Leys, M.R. and Veenvliet, H., J. Cryst. Growth 93,145 (1988).
14. Dubois, L.H and Schwarz, G. P., Phys. Rev. B, 26, 794 (1982).
15. McConagie, V. M. and Nielsen, H. H., Phys. Rev. 75, 633(1949).
16. Gee, P. E. and Hicks, R. T., Mater. Res. Soc. Symp. Proc. 222 (1991).
17. Frankel, D. J., Yu, C., Harbison, J. P., and Farrell, H. H., J. Vac. Sci. Technol. B, 5, 1113 (1987).
18. Sasaki, M., Kawakyu, Y., and Mashita, M., Jap. J. Appl. Phys. 28 L131 (1989).
19. Richter, L., Buntin, S. A., King, D. A., and Cavanagh, R.R., Phys. Rev. Lett. 65, 1957 (1990).
20. Creighton, J. R. and Banse, B. A., Mater. Res. Soc. Symp. Proc. 222 (1991).

Thermal and Photoinduced Decomposition Pathways of Arsine on GaAs(100)

  • X.-Y. Zhu (a1), M. Wolf (a1), T. Huett (a1) and J. M. White (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed