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Thin Film Formation of Transparent Conductive Oxides by Solution-Based Mist Deposition Method toward Hybrid Device Applications

Published online by Cambridge University Press:  24 January 2012

Takumi Ikenoue  and
Shizuo Fujita
Takumi Ikenoue
Affiliation:
Department of Electronic Science and Engineering, Kyoto University, Kyoto, 615-8510, Japan Photonics and Electronics Science and Engineering Center, Kyoto University, Kyoto, 615-8510, Japan
Shizuo Fujita
Affiliation:
Photonics and Electronics Science and Engineering Center, Kyoto University, Kyoto, 615-8510, Japan
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Abstract

Transparent conductive oxides, gallium-doped zinc oxide (ZnO:Ga) and tin-doped indium oxide (ITO), were fabricated by a solution-based ultrasonic spray-assisted mist deposition technique. The ZnO:Ga films showed a good c-axis orientation perpendicular to the substrate and achieved low resistivity of 2.3 × 10-3 Ω cm with high transmittance in wide wavelength region. ITO films have lower resistivity of 1.4 × 10-4 Ω cm and high transmittance over the wavelength of 300 nm.

Keywords

solution depositiontransparent conductorspray pyrolysis

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References

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