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Thin Film Formation of Transparent Conductive Oxides by Solution-Based Mist Deposition Method toward Hybrid Device Applications

  • Takumi Ikenoue (a1) (a2) and Shizuo Fujita (a2)
Abstract
ABSTRACT

Transparent conductive oxides, gallium-doped zinc oxide (ZnO:Ga) and tin-doped indium oxide (ITO), were fabricated by a solution-based ultrasonic spray-assisted mist deposition technique. The ZnO:Ga films showed a good c-axis orientation perpendicular to the substrate and achieved low resistivity of 2.3 × 10-3 Ω cm with high transmittance in wide wavelength region. ITO films have lower resistivity of 1.4 × 10-4 Ω cm and high transmittance over the wavelength of 300 nm.

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2.Ullal H. S., Zweibel K., Von Roedern B., Proceedings of the 29th IEEE Photovoltaic Specialists Conference 472 (2002).
3.Kawaharamura T., Nishinaka H., Kamada Y., Masuda Y., Lu J. G., and Fujita S., J. Kor. Phys. Soc. 53, 2976 (2008).
4.Kawaharamura T., Nishinaka H., and Fujita S., J. Soc. Mater. Sci. Jpn. 57, 481 (2008) [in Japanese].
5.Hussien Gamal A. M., Acta Thermochimica, 186 187 (1991).
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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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