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Thin Film on Asic - A Novel Concept for Intelligent Image Sensors

Published online by Cambridge University Press:  21 February 2011

H. Fischer ,
J. Schulte ,
J. Giehl ,
M. Böhm  and
J. P. M. Schmitt
H. Fischer
Affiliation:
University of Siegen, Center for Sensor Systems, W-5900 Siegen, Germany
J. Schulte
Affiliation:
University of Siegen, Center for Sensor Systems, W-5900 Siegen, Germany
J. Giehl
Affiliation:
University of Siegen, Center for Sensor Systems, W-5900 Siegen, Germany
M. Böhm
Affiliation:
University of Siegen, Center for Sensor Systems, W-5900 Siegen, Germany
J. P. M. Schmitt
Affiliation:
Solems SA, Rue Léon Blum, F-91124, Palaiseau Cedex, France
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Abstract

Two different pixel detectors have been fabricated, each of them consisting of an a-Si:H based photodiode layer on top of a crystalline silicon integrated circuit. Both sensors are arranged in a matrix and addressed columnwise, providing parallel readout of the matrix rows or optional random access. One sensor is an a-Si:H detector / x-Si switching transistor combination with 256 × 256 pixels and a pixel size of 100μm × 100μm. The signal transport in the array is examined, demonstrating its capability of very fast information readout. The second sensor, which consists of an array of 32 × 32 pixels on a 5μm PMOS ASIC, performs digital contour extraction. Experimental data on the performance of the intelligent array are also reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 258: Symposium A – Amorphous Silicon Technology – 1992 , 1992 , 1139
Copyright
Copyright © Materials Research Society 1992

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References

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