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Tuning Hierarchical Cluster Assembly in Pulsed Laser Deposition of Al-doped ZnO

Published online by Cambridge University Press:  28 March 2013

Paolo Gondoni ,
Valeria Russo ,
Carlo E. Bottani ,
Andrea Li Bassi  and
Carlo S. Casari
Paolo Gondoni
Affiliation:
Dipartimento di Energia and NEMAS – Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, via Ponzio 34/3, I-20133 Milano, Italy
Valeria Russo
Affiliation:
Dipartimento di Energia and NEMAS – Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, via Ponzio 34/3, I-20133 Milano, Italy
Carlo E. Bottani
Affiliation:
Dipartimento di Energia and NEMAS – Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, via Ponzio 34/3, I-20133 Milano, Italy Center for Nano Science and Technology @Polimi, Istituto Italiano di Tecnologia, Via Pascoli 70/3, I-20133 Milano, Italy
Andrea Li Bassi
Affiliation:
Dipartimento di Energia and NEMAS – Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, via Ponzio 34/3, I-20133 Milano, Italy Center for Nano Science and Technology @Polimi, Istituto Italiano di Tecnologia, Via Pascoli 70/3, I-20133 Milano, Italy
Carlo S. Casari
Affiliation:
Dipartimento di Energia and NEMAS – Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, via Ponzio 34/3, I-20133 Milano, Italy Center for Nano Science and Technology @Polimi, Istituto Italiano di Tecnologia, Via Pascoli 70/3, I-20133 Milano, Italy
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Abstract

The synthesis of hierarchically assembled Al-doped ZnO layers by Pulsed Laser Deposition (PLD) at room temperature was investigated. PLD was performed in a background pressure of 100 Pa O2 to deposit clusters in a low energy regime and obtain nano- and mesostructures resulting from a hierarchical assembly of nanoclusters. We here analyzed the effects of varying the gas flow rate on mesoscale morphology, mass density and optical properties. The variation of the target-to-substrate distance was also investigated, identifying its effects on mass density and film morphology. The optimization of optical properties in terms of transparency and light scattering capability is of potential interest for photovoltaic applications.

Keywords

optical propertiescluster assemblyphysical vapor deposition (PVD)
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1497: Symposium K – Hierarchically Structured Materials for Energy Conversion and Storage , 2013 , mrsf12-1497-k07-03
Copyright
Copyright © Materials Research Society 2013

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References

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