Hostname: page-component-848d4c4894-x5gtn Total loading time: 0 Render date: 2024-05-16T00:37:55.022Z Has data issue: false hasContentIssue false
  • English
  • Français

Ultrasmooth, Conducting Films Composed of Mo/Si Multilayers

Published online by Cambridge University Press:  15 February 2011

D. G. Stearns ,
S. L. Baker  and
M. A. Wall
D. G. Stearns
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
S. L. Baker
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
M. A. Wall
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
Get access

Abstract

We investigate the variation of microstructure and electron transport with layer thickness in Mo/Si multilayer films deposited by magnetron sputtering.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 183
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1) Stearns, D. G., Rosen, R. S. and Vernon, S. P., J. Vac. Sci. Technol. A 9, 2662 (1991).Google Scholar
2) Sondheimer, E. H., Advan. Phys. 1, 1 (1952).Google Scholar