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Use of A New High Speed Acrylate Deposition Process to Make Novel Multilayer Structures

Published online by Cambridge University Press:  15 February 2011

David G. Shaw  and
Marc G. Langlois
David G. Shaw
Affiliation:
Catalina Coatings, Inc., 1850 West Grant Rd., Suite 106, Tucson, AZ, 85745, 520-623-6766
Marc G. Langlois
Affiliation:
Catalina Coatings, Inc., 1850 West Grant Rd., Suite 106, Tucson, AZ, 85745, 520-623-6766
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Abstract

A new process has been developed to deposit acrylate thin films at speeds of 1500 ft/minute or higher. These films range in thickness from a few hundred Angstroms to a fewmicrons and are uniform in thickness to within 5%. They can vary in refractive index from 1.35 to 1.60 and have mechanical properties from very hard and abrasion resistantto very soft and flexible.

The acrylate deposition process was originally developed for multilayer acrylate/aluminum capacitors where over 10,000 layer structures were produced[l]. The process is compatible with other vapor deposition processes such as sputtering, evaporation, and CVD. Both processes can take place at the same time in the same vacuum chamber toproduce various multilayer structures.

This paper will discuss some of the features of this process and the associated equipment. It will present examples of the wide range of acrylate/acrylate, acrylate/metal, and acrylate/inorganic material structures that can be made. It will discuss various applications for these structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 77
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1. Yializis, A., Powers, G., Shaw, D.G., “A New High Temperature Multilayer Capacitor with Acrylate Dielectrics”, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, Vol. 13, No. 4, December, 1990.Google Scholar
2. Shaw, D.G., “A new High Speed Vapor Deposition Process for Applying Acrylate Coatings”, Conference Proceedings of the 1992 Radtech Conference in Boston.Google Scholar
3. Shaw, D.G., Langlois, M.G., “Use of Vapor Deposited Acrylate Coatings to Improve the Barrier Properties of Metallized Film”, Conference Proceedings of the Society of Vacuum Coaters, Boston, 1994.Google Scholar
4. Shaw, D.G., Langlois, M.G., “A New High Speed Process for Vapor Depositing Fluoro and Silicone Acrylates for Release Coating Applications”, Conference Proceedings of the Society of Vacuum Coaters, Chicago, 1995.Google Scholar