Thermal transport across interfaces is an important issue for microelectronics, photonics, and thermoelectric devices and has been studied both experimentally and theoretically in the past. In this paper, thermal interface resistance (1/G) between aluminum and silicon with nanoscale vacancies was calculated using non-equilibrium molecular dynamics (NEMD). Both phonon-phonon coupling and electron-phonon coupling are considered in calculations. The results showed that thermal interface resistance increased largely due to vacancies. The effect of both the size and the type of vacancies is studied and compared. And an obvious difference is found for structures with different type/size vacancies.
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