Hostname: page-component-cb9f654ff-mx8w7 Total loading time: 0 Render date: 2025-08-30T19:07:39.606Z Has data issue: false hasContentIssue false
  • English
  • Français

X-ray Diffraction Study of the Mechanical Elastic Properties ofNanometric W/Cu Multilayers

Published online by Cambridge University Press:  26 February 2011

Pascale Villain ,
Baptiste Girault ,
Pierre-Olivier Renault ,
Eric Le Bourhis ,
Philippe Goudeau  and
Frederic Badawi
Pascale Villain
Affiliation:
pascale.villain@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France, +33549496646, +33549496692
Baptiste Girault
Affiliation:
baptiste.girault@etu.univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Pierre-Olivier Renault
Affiliation:
pierre.olivier.renault@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Eric Le Bourhis
Affiliation:
eric.le.bourhis@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Philippe Goudeau
Affiliation:
philippe.goudeau@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Frederic Badawi
Affiliation:
frederic.badawi@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Get access

Abstract

The mechanical behavior of W/Cu multilayers with a period of 24 nm and a 1/3W/Cu thickness ratio prepared by magnetron sputtering was analyzed using amethod combining X-ray diffraction and tensile testing. Tests were performedboth with a conventional and a synchrotron light source to analyze theelastic response of the system. Comparison between the strain-load curvesobtained in both experimental conditions and estimated curves clearly showsthat high quality synchrotron measurements are a preliminary condition forsize-effect studies. Moreover, cyclic tests were used to determine theelastic domain of each material and compare their mechanical responses.Plastic strain was observed in copper while tungsten layers were stillelastically strained until cracks appeared.

Keywords

elastic propertiesx-ray diffraction (XRD)nanoscale

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1. Misra, A., Kung, H. and Embury, J. D., View point set “deformation and ductility of nanoscale metallic multilayers”, Scripta mat. 50 707 (2004)Google Scholar
2. Baker, S.P., Nix, W.D., J. Mater. Res. 9 3131 (1994)Google Scholar
3. Huang, H. and Spaepen, F., Acta Mater. 48 3261 (2000)Google Scholar
4. Kraft, O. and Volkert, C.A., Adv. Engin. Mater. 3 99 (2001)Google Scholar
5. Cervellino, A., Derlet, P.M. and van Swygenhoven, H., Acta. Mater. 54 1851 (2006)Google Scholar
6. Zhang, G.P., Liu, Y., Wang, W. and Tan, J., Appl. Phys. Lett. 88 013105 (2006)Google Scholar
7. Badawi, K.F., Villain, P., Goudeau, P. and Renault, P.-O., Appl. Phys. Lett. 80, 4705 (2002)Google Scholar
8. Villain, P., Goudeau, P., Renault, P.-O., and Badawi, K.F., Appl. Phys. Lett. 81 4365 (2002)Google Scholar
9. Villain, P., Faurie, D., Renault, P.-O., Bourhis, E. Le, Goudeau, P., and Badawi, K.-F., Mater Res. Poc. Symp. Proc 875 O1.3 (2005)Google Scholar
10. Faurie, D., Renault, P.-O., Bourhis, E. Le, and Goudeau, P., Acta Mater. 54 4503 (2006)Google Scholar
11. Noyan, C. and Cohen, J.B., Residual stress measurement by diffraction and interpretation (New York, Springer, 1987)Google Scholar
12. Hauk, V., Structural and residual stress analysis by non destructive methods: evaluation, application, assessment. (Amsterdam, Elsevier, 1997)Google Scholar
13. Hurley, D.C., Geiss, R.H., Kopycinska-Müller, M., Müller, J., Read, D.T., Wright, J.E., Jennett, N.M. and Maxwell, A.S., J. Mater. Res. 20 1186 (2005)Google Scholar
14. Schiøtz, J., Vegge, T., Tolla, F.D. Di and Jacobsen, K.W., Phys. Rev. B 60 11971 (1999)Google Scholar
15. Faurie, D., Renault, P.-O., Bourhis, E. Le, Goudeau, P., Castelnau, O., Brenner, R. and Patriarche, G., Appl. Phys. Lett. 89 061911 (2006)Google Scholar
16. Faurie, D., Renault, P.-O., Bourhis, E. Le, Goudeau, P., J. Appl. Phys. 98 093511 (2005)10.1063/1.2126154Google Scholar