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X-Ray Scattering Studies of Thin Films and Multilayers

Published online by Cambridge University Press:  03 September 2012

G. S. Cargill III
G. S. Cargill III*
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Hts., NY 10598
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Abstract

X-ray scattering experiments provide important information about the atomic scale structure and the microstructure of thin films and multilayers. The high intensity, brightness, and broad energy spectrum of synchrotron radiation greatly extend capabilities of scattering experiments, particularly for scattering from ultrathin films and for anomalous dispersion scattering from alloys. Examples of scattering studies of both crystalline and amorphous materials are given in this overview.

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