In this work we study the properties of cadmium sulfide thin films grown by chemicalbath deposition and close-spaced sublimation, on SnO2/borosilicate glass and SnO2/silicon substrates, before and after treatment in vapor CdCl2 at 400°C for 5 minutes. The as-deposited CBD CdS films had cubic structure, poor crystallinity, and high density of planar defects. After the CdCl2 treatment, these films recrystallized to the hexagonal structure, with improved crystallinity and a decrease in the density of planar defects. The as-deposited CSS films had hexagonal structure, better crystallinity, and lower density of planar defects. The main effect of the CdCl2 treatment was a decrease in the intragrain strain in the films. The CBD films had smaller grains and provided a good conformal coverage over the SnO2 films. In contrast to these films, CSS CdS did not have any oxygen or chlorine in its bulk.