From the irradiation resistance and high-temperature strength, oxide dispersion strengthened (ODS) ferritic steels are candidate materials for advanced and fusion reactors. For the development of advanced steels the key issue is to homogenize nano-particles into matrix. Recent studies have indicated that Ti addition can homogenize Y-Ti complex particles into ferrite matrix, but the reason of the effect of additional elements has not been clarified. In this model study, we focus on the effect of additional elements, such as IV and V families and other oxide formers, which can control potentially the distribution of the oxide particles. The materials used in this study were based on Fe-9Cr-Y2O3 alloys which were mechanical alloyed (MA) from the powder of Fe, Cr and Y2O3, which was added systematically with the element of Ti, Zr, Ta, V, Nb, Hf, Al, Si and others. Usually ODS fabrication process is required for hot extrusion, but we annealed up to 1150 C for simplify the microstructure. To evaluate the distribution of ODS particles; we used TEM equipped with EDS after electro-polishing or FIB techniques. (1) In the case of Si or Al addition, oxides were disappeared after MA process, which means Y2O3 and other elements should be in solution at non-equilibrium condition. Two types of oxides of Y2O3 and Al2O3 or SiO2 developed after the annealing at 850 C, but only complex oxides were developed after the annealing at 1150 C. This result suggests that the oxide formation is independent process for Y and Si or Al. (2) In the case of Ti addition, oxides also were disappeared after MA process, but developed after annealing at 1150 C. This means that Ti can stabilize complex oxides of Y and Ti, and enhance the fine distribution of the oxides comparing with simple Fe-9Cr-Y2O3 alloy.