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D035 Depth Resolved Strain Analysis of Lateral Nonostructures Produced by Focused GA ION Implantation in GAAS

Published online by Cambridge University Press:  20 May 2016

J. Grenzer
Affiliation:
Institut of Physics, University of Potsdam, Potsdam, Germany
U. Pietsch
Affiliation:
Institut of Physics, University of Potsdam, Potsdam, Germany
B. Köhler
Affiliation:
Fraunhofer Institute for Nondestructive Testing, Dresden, Germany

Abstract

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Type
Denver X-Ray Conference
Copyright
Copyright © Cambridge University Press 2003

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