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Grazing excidence diffraction versus grazing incidence diffraction for strain/stress evaluation in thin films

Published online by Cambridge University Press:  10 January 2013

Anouar Njeh ,
Thomas Wieder  and
Hartmut Fuess
Anouar Njeh
Affiliation:
Technische Universität Darmstadt, FB Material und Geowissenschaften, Petersenstr. 23, D-64287 Darmstadt, Germany
Thomas Wieder
Affiliation:
Technische Universität Darmstadt, FB Material und Geowissenschaften, Petersenstr. 23, D-64287 Darmstadt, Germany
Hartmut Fuess
Affiliation:
Technische Universität Darmstadt, FB Material und Geowissenschaften, Petersenstr. 23, D-64287 Darmstadt, Germany
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Abstract

The reflection shift δ2Θ caused by a radial shift δr of the sample away from its tangential position at the focusing circle is examined for grazing incidence diffraction and grazing excidence diffraction. Experimental results for residual strain/stress evaluation on thin films using a Bragg–Brentano diffractometer with a grazing incidence equipment are presented. Grazing excidence diffraction is less sensitive to δr than grazing incidence diffraction.

Keywords

X-ray diffractiongrazing incidenceresidual stress evaluationthin films

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Type
Technical Articles
Information
Powder Diffraction , Volume 15 , Issue 4 , December 2000 , pp. 211 - 216
Copyright
Copyright © Cambridge University Press 2000

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