Optimizing process- and layout-design in the development of modern electronic devices is key to achieve requiredcharacteristics.Coming along with the growing complexity of device structures, associated effects must be considered in an even more complex manner. The use of three-dimensional process-and device-simulation tools is inevitable. Because of the huge effortconcerning computer resourcesfrom three-dimensional simulations it is of big interest toenable efficient ways for optimization, as early as possible in process flow.Hence this work shows, how it was possible, to optimize ahigh-voltage PMOS transistor before starting a complex three-dimensionaldevice simulation.