Skip to main content Accessibility help
×
  1. Home
  2. Books
  3. Inertial MEMS
  • Cited by 123
      • Show more authors
      • You may already have access via personal or institutional login
    • Select format
    • Publisher:
      Cambridge University Press
      Publication date:
      03 May 2011
      17 February 2011
      ISBN:
      9780511933899
      9780521766586
      DOI:
      https://doi.org/10.1017/CBO9780511933899
      Dimensions:
      (247 x 174 mm)
      Weight & Pages:
      1.09kg, 492 Pages
      Dimensions:
      Weight & Pages:
      • Subjects:
      Engineering, Electronic, Optoelectronic Devices, and Nanotechnology, Circuits and Systems
    You may already have access via personal or institutional login
    • Selected: Digital
    Add to cart View cart Buy from Cambridge.org
    Subjects:
    Engineering, Electronic, Optoelectronic Devices, and Nanotechnology, Circuits and Systems
    Information

    Book description

    A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

    Refine List

    Actions for selected content:

    Select all | Deselect all
    • View selected items
    • Export citations
    • Download PDF (zip)
    • Save to Kindle
    • Save to Dropbox
    • Save to Google Drive

    Save Search

    You can save your searches here and later view and run them again in "My saved searches".

    Please provide a title, maximum of 40 characters.
    Cancel
    ×

    Contents

    Contents

    Metrics

    Full text views

    Total number of HTML views: 0
    Total number of PDF views: 0 *
    Loading metrics...

    Book summary page views

    Total views: 0 *
    Loading metrics...

    * Views captured on Cambridge Core between #date#. This data will be updated every 24 hours.

    Usage data cannot currently be displayed.

    Accessibility standard: Unknown

    Why this information is here

    This section outlines the accessibility features of this content - including support for screen readers, full keyboard navigation and high-contrast display options. This may not be relevant for you.

    Accessibility Information

    Accessibility compliance for the PDF of this book is currently unknown and may be updated in the future.