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Influence of particulates generated in a CH4 low pressure radiofrequency discharge on dcnegative self bias voltage

Published online by Cambridge University Press:  15 July 2000

V. Massereau-Guilbaud ,
I. Géraud-Grenier  and
A. Plain
V. Massereau-Guilbaud*
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, Site de Bourges, rue G. Berger, BP 4043, 18028 Bourges Cedex, France
I. Géraud-Grenier
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, Site de Bourges, rue G. Berger, BP 4043, 18028 Bourges Cedex, France
A. Plain
Affiliation:
LASEP, Faculté des Sciences, Université d'Orléans, Site de Bourges, rue G. Berger, BP 4043, 18028 Bourges Cedex, France
*
Veronique.Massereau@univ-orleans.fr
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Abstract

The formation and the behavior of particulates have been studiedin a pure methane rf plasma (13.56 MHz) for pressures in therange 20−150 Pa. The generated particulates are evidenced usinglaser light scattering. They are mainly observed at the sheathboundaries where they are suspended in well defined traps. Particulateappearance times at the upper sheath boundary have been determined using the 90° scatteredlight intensity at 514.5 nm. The appearance time ofparticulates is sensitive to the working pressure:the higher the pressure, the shorter the appearance time.In our experimental conditions, no particulates are observed in thecloud near the biased electrodefor pressures lower than 30 Pa. The negatively charged particulatesinduce changes in the electrical characteristics of the discharge. The generation andthe behavior ofparticulates are correlated with the time evolutions of the laserbeam extinction and of the absolute value of the dc self bias voltage during an experiment.

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Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 11 , Issue 1 , July 2000 , pp. 71 - 76
Copyright
© EDP Sciences, 2000

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