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Advanced Ion Beam Material Processing Projects in Japan

Published online by Cambridge University Press:  25 February 2011

Isao Yamada
Isao Yamada*
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University Sakyo, Kyoto 606, Japan
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Abstract

R&D projects of ion beam systems and ion beam process technology have been conducted under the National Research and Development Program known as the “Large-Scale project”. The project includes development of five large-scale ion beam systems and their application for surface modifications. Under another program called the National Research Facility Development Project, the Ion Engineering Center Corporation has been established in order to promote industrial applications of ion beam processes. This paper reviews those projects and recent progress on development of large-scale ion beam systems and related materials processing technology. Major research projects which have been funded by the Ministry of Education for ion beam related researches are also reviewed.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 268: Symposium K – Materials Modification by Energetic Atoms and Ions , 1992 , 261
Copyright
Copyright © Materials Research Society 1992

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References

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