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UV Photoannealing and RTP of Thin Sol-Gel Films

Published online by Cambridge University Press:  10 February 2011

R. E.Van de Leest  and
F. Roozeboom
R. E.Van de Leest
Affiliation:
Philips Research Labs, Prof.Holstlaan 4, 5656 AA Eindhoven, The Netherlands
F. Roozeboom
Affiliation:
Philips Research Labs, Prof.Holstlaan 4, 5656 AA Eindhoven, The Netherlands
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Abstract

Various annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 429: Symposium N – Rapid Thermal and Integrated Processing V , 1996 , 193
Copyright
Copyright © Materials Research Society 1996

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