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1 results

  • Low Resistance Contacts to P-Type GaN

  • Taek Kim, Jinseok Khim, Suhee Chae, Taeil Kim
  • Journal:
    MRS Online Proceedings Library Archive / Volume 468 / 1997
    Published online by Cambridge University Press:
    10 February 2011, 427
    Print publication:
    1997

  • We report the low resistance ohmic contacts to p-GaN using a Pd/Au bimetal scheme. A specific contact resistivity of 9.1 × 10-3 Ω-cm2 was obtained after annealing. The metallization was e-beam evaporated on 2 μm-thick p-GaN (∼ 9 × 1016/cm3) layers grown on c-plane sapphire substrates by metalorganic chemical vapor deposition (MOCVD). The comparison with other contacts showed that the contact resistivity of the Pd/Au contacts was at least one order smaller than those of Pt/Au and Ni/Au contacts.