1 results
A 3D Soft-EHL Model for Simulating Feature-scale Defects in Advanced Node ICs
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1560 / 2013
- Published online by Cambridge University Press:
- 10 July 2013, mrss13-1560-bb02-02
- Print publication:
- 2013
-
- Article
- Export citation