We report on typical examples of thin carbon films prepared employing energybeam techniques such as ion beam deposition, ion beam assisted depositionand Laser illumination. In an annealing study of ion beam deposited carbonfilms, small dots with sub-micron size are isolated through the selectiveoxidation of sp3-bonded amorphous carbon films, and they wereconfirmed to be diamond nano-particles by micro-Raman spectrometry. C60 deposition assisted with Ne ion beam results in two kindsof films: 1) The quality of C60 films is improved by the assistof 500eV Ne ion bombardment. 2) The increase of Ne ion Energy results in thedecomposition of C60 and the films obtained at 700°C containpossible nano-diamond crystallites at the center of the intense beam spot.The Laser illumination decomposes C60 molecules in general, butthe fine-tuning of Laser energy density makes it possible to prepare anarray of high luminescent spots.
