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1 results

  • Ellipsometric Porosimetry of Porous Low-k Films withQuazi-Closed Cavities

  • Mikhail R. Baklanov, Konstantin P. Mogilnikov, Jin-Heong Yim
  • Journal:
    MRS Online Proceedings Library Archive / Volume 812 / 2004
    Published online by Cambridge University Press:
    17 March 2011, F5.4
    Print publication:
    2004

  • Evaluation of quasi-closed cavities connected with air through narrow necksis discussed. These cavities behave as closed pores when they are studied byPositron Annihilation Lifetime Spectroscopy (PALS). The reason is a shortlifetime of o-positronium (Ps) and energy barrier that exist for Psdiffusion from large pores (d>3 nm) to small ones (d<3 nm). It isshown that more comprehensive information can be obtained using adsorptionporosimetry. Standard adsorptives used in adsorption porosimetry haveinfinite lifetime allowing complete penetration and filling all the cavitiesduring the measurement. Calculation of the neck and cavity sizes is based onthe theory of metastable adsorption phases developed by Derjagin, Broekhoffand de Boer (DBdB). Results of evaluation are in good agreement with dataobtained by SEM and TEM.