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  3. A Guide to Hands-on MEMS Design and Prototyping
  • Cited by 6
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    • Publisher:
      Cambridge University Press
      Publication date:
      07 September 2011
      25 August 2011
      ISBN:
      9780511984662
      9780521889254
      9781107645790
      DOI:
      https://doi.org/10.1017/CBO9780511984662
      Dimensions:
      (228 x 152 mm)
      Weight & Pages:
      0.43kg, 178 Pages
      Dimensions:
      (228 x 152 mm)
      Weight & Pages:
      0.32kg, 178 Pages
      • Subjects:
      Engineering, Electronic, Optoelectronic Devices, and Nanotechnology, Engineering Design, Kinematics, and Robotics
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    Subjects:
    Engineering, Electronic, Optoelectronic Devices, and Nanotechnology, Engineering Design, Kinematics, and Robotics
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    Book description

    Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

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