Published online by Cambridge University Press: 07 September 2011
In a multi-project wafer process your layout will be included with other users' layouts that are combined together into a wafer level layout. All of the designs will be fabricated together using the same process. When all of the fabrication steps have been completed the wafer is subdivided into individual dies for each of the users using an abrasive diamond saw. Dicing “streets” are put in at the wafer level layout by the supplier to comprehend the “kerf ” (width) of the saw blade and a safety zone for chipping during the sawing operation. The saw blade and wafer are sprayed with water to keep them cool during the dicing operation, and the sawing process generates residual particles that must be removed in a post-sawing cleaning step. At this stage custom steps can be performed for each individual customer at the die level. Some of the custom steps include sub-dicing of the individual die into smaller pieces, post-processing steps such as sacrificial release and critical point drying, and packaging of the parts. Packaging can include attaching the die to a carrier, wire bonding and sealing the package to protect the parts from the environment and to provide a controlled interface (electrical, thermal, mechanical, and/or optical) between the parts and the environment.
To save this book to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.
Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.
Find out more about the Kindle Personal Document Service.
To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Dropbox.
To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.