Robotics refers to the study and use of robots (Nof, 1999). Likewise, industrial robotics refers to the study and use of robots for manufacturing where industrial robots are essential components in an automated manufacturing environment. Similarly, industrial robotics for electronics manufacturing, in particular semiconductor, hard disk, flat panel display (FPD), and solar manufacturing refers to robot technology used for automating typical cleanroom applications. This chapter reviews the evolution of industrial robots and some common robot types, and builds a foundation for Chapter 2, which introduces cleanroom robotics as an engineering discipline within the broader context of industrial robotics.

History of industrial robotics

Visions and inventions of robots can be traced back to ancient Greece. In about 322 BC the philosopher Aristotle wrote: “If every tool, when ordered, or even of its own accord, could do the work that befits it, then there would be no need either of apprentices for the master workers or of slaves for the lords.” Aristotle seems to hint at the comfort such ‘tools’ could provide to humans. In 1495 Leonardo da Vinci designed a mechanical device that resembled an armored knight, whose internal mechanisms were designed to move the device as if controlled by a real person hidden inside the structure. In medieval times machines like Leonardo's were built for the amusement of affluent audiences. The term ‘robot’ was introduced centuries later by the Czech writer Karel Capek in his play R. U. R. (Rossum's Universal Robots), premiered in Prague in 1921.