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Generation of microwave plasma under high pressure and fabrication of ultrafine carbon particles

Published online by Cambridge University Press:  31 January 2011

H. Yagi ,
T. Ide ,
H. Toyota  and
Y. Mori
H. Yagi
Affiliation:
Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan
T. Ide
Affiliation:
Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan
H. Toyota
Affiliation:
Department of Mechanical Engineering, Ehime University, Matsuyama 79077,Japan
Y. Mori
Affiliation:
Department of Precision Science and Technology, Osaka University, Suita 565, Japan
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Abstract

A microwave plasma generator, which functions under high pressure, has been developed and used in the fabrication of fine carbon particles. The plasma generator is a two-stage-type resonator, which consists of rectangular and semi-cylindrical-type resonators which are coupled in series for torching plasma and keeping it stable under high pressure. The plasma can be torched in helium gas at 3 × 106 Pa by tuning the dimensions of apparatus elements. Fine carbon particles of ~50 nm are obtained using a mixture of helium and methane gas. The particles are found to be crystalline from the results of transparent electron microscopy and diffraction analysis.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 6 , June 1998 , pp. 1724 - 1727
Copyright
Copyright © Materials Research Society 1998

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References

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