Skip to main content
    • Aa
    • Aa

An investigation of hardness and adhesion of sputter-deposited aluminum on silicon by utilizing a continuous indentation test

  • D. Stone (a1), W. R. LaFontaine (a1), P. Alexopoulos (a2), T. -W. Wu (a2) and Che-Yu Li (a1)...

The hardness of aluminum films on silicon are measured as functions of depth of the indenter. The films have thicknesses of 0.25,0.5, and 1.0μm. The adhesion between one film and the substrate has been reduced through the prior deposition of a 10 nm layer of carbon. In each case the hardness is found to increase as the indenter approaches the film-substrate interface, but the rate of increase is greater for a film with good adhesion than for one with poor adhesion. It is suggested that this increase results from the constraint on deformation of the film by the substrate. A physical model is proposed whereby the yield stress of the film, σo, and an average effective shear strength τ of the indenter-film and film-substrate interfaces, may be determined from the data.

Hide All
1Loubet J. L. Georges J. M. and Meille G. in ASTM STP 889, edited by Blau P. J. and Lawn B. (American Society for Testing and Materials, Philadelphia, PA, 1986), pp. 7289.
2Pethica J.B. Hutchings R. and Oliver W.C. Philos. Mag. A48, 593 (1983).
3Engel P.A. and Roshon D.D. J. Adhes. 10, 237 (1979).
4Tazaki M. Nishibori M. and Kinosita K. Thin Solid Films 51, 13 (1978).
5Pollock H. M. Maugis D. and Barquins M. in Ref. 1, pp. 4771.
6Lebouvier D. Gilormini P. and Felder E. J. Phys. D18, 199 (1985).
7Hannula S.P. Stone D. and Li C.Y. Mater. Res. Soc. Symp. Proc. 40, 217 (1985).
8Stone D. LaFontaine W. Ruoff S. Hannula S.P. Yost B. and Li CheYu, Mater. Res. Soc. Symp. Proc. 72, 127 (1986).
9Doerner M. F. and Nix W. D. J. Mater. Res. 1, 601 (1986).
1OMarshall D. B. and Lawn B. R. in Ref. 1, pp. 2646.
11Mott B. W. Microindentation Hardness Testing (Butterworths, London, 1957).
12Dieter G. E. Mechanized Metallurgy (McGraw-Hill, New York, 1976), 2nd ed., p. 565.
13Hall E. O. Proc. Phys. Soc. London B643, 747 (1961); N.J. Petch J. Iron Steel Inst. 174, 25 (1953).
14Doerner M. F. Gardner D. S. and Nix W. D. J. Mater. Res. 1, 845 (1986).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 44 *
Loading metrics...

Abstract views

Total abstract views: 179 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 21st October 2017. This data will be updated every 24 hours.