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Chemical and physical characterization of C(N)-doped W–S sputtered films

Published online by Cambridge University Press:  03 March 2011

A. Nossa  and
A. Cavaleiro
A. Nossa
Affiliation:
Escola Superior de Tecnologia e Gestão, Instituto Politécnico da Guarda, Guarda, Portugal
A. Cavaleiro
Affiliation:
Instituto de Ciências e Engenharia de Materiais e Superfícies, Departamento de Engenharia Mecânica, Faculdade de Ciências e Tecnologia da Universidade de Coimbra, Pinhal de Marrocos, 3030 Coimbra, Portugal
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Abstract

The load-bearing capacity of self-lubricating W–S films can be improved by doping with nitrogen or carbon. In this study, the chemical composition, the atomic bonding, the structure, and the surface and cross section morphologies of sputtered W–S–C(N) films were analyzed. The addition of the doping element leads to a progressive broadening of the x-ray diffraction (XRD) peaks indicating a loss of crystallinity. In W–S–N films, amorphous structure could be obtained. In W–S–C films, W–C compounds were detected in conjunction with the hexagonal WS2 phase. For the highest C contents, a nanocomposite structure, including those phases and graphite, was suggested for the film. X-ray photoelectron spectroscopy results showed different types of bonds in the W4f peak in good agreement with the XRD results, i.e., when W–C(N) compounds were indexed W–S, W–C, and W–N bonds are present in the W4f peak. For the highest C content film, the detection of C–C bond in the C1s peak confirmed the formation of graphite.

Keywords

Thin filmLubricantSputtering
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 8 , August 2004 , pp. 2356 - 2365
Copyright
Copyright © Materials Research Society 2004

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